Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems
Direct transfer of pre-patterned materials strongly benefits realisation of integrated functional systems over conventional fabrication process. Here, the authors demonstrate a self-delamination-driven pattern transfer of a single crystalline silicon thin membrane via well-controlled interfacial des...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2021-11-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-021-27208-5 |