Single-color peripheral photoinhibition lithography of nanophotonic structures

Single-color peripheral photoinhibition lithography of nanophotonic structures

Abstract Advances in direct laser writing to attain super-resolution are required to improve fabrication performance and develop potential applications for nanophotonics. In this study, a novel technique using single-color peripheral photoinhibition lithography was developed to improve the resolutio...

Full description

Bibliographic Details
Main Authors: Minfei He, Zhimin Zhang, Chun Cao, Yiwei Qiu, Xiaoming Shen, Guozun Zhou, Zixin Cai, Xinjie Sun, Xin He, Liang Xu, Xi Liu, Chenliang Ding, Yaoyu Cao, Cuifang Kuang, Xu Liu
Format: Article
Language:English
Published: SpringerOpen 2022-10-01
Series:PhotoniX
Subjects:
Peripheral photoinhibition lithography
Nanophotonic structures
Direct laser writing
Two-photon polymerization
Super-resolution
Online Access:https://doi.org/10.1186/s43074-022-00072-2

Internet

https://doi.org/10.1186/s43074-022-00072-2

Similar Items