An Improved Large-Field Microscopic Speckle Interferometry System for Dynamic Displacement Measurement of MEMS
The traditional microscopic speckle interferometer has limited applications in engineering due to its small field of view. In this paper, we propose a large-field microscopic speckle interferometer which embeds two doublet lens groups in the improved Mach–Zehnder optical path structure to expand its...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-07-01
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| Series: | Photonics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2304-6732/8/7/271 |