An Improved Large-Field Microscopic Speckle Interferometry System for Dynamic Displacement Measurement of MEMS
The traditional microscopic speckle interferometer has limited applications in engineering due to its small field of view. In this paper, we propose a large-field microscopic speckle interferometer which embeds two doublet lens groups in the improved Mach–Zehnder optical path structure to expand its...
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| Format: | Article |
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MDPI AG
2021-07-01
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| Series: | Photonics |
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| Online Access: | https://www.mdpi.com/2304-6732/8/7/271 |
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| author | Chenjia Gao Zhan Gao Yuhao Niu Xu Wang Jieming Zhao Lin Deng |
| author_facet | Chenjia Gao Zhan Gao Yuhao Niu Xu Wang Jieming Zhao Lin Deng |
| author_sort | Chenjia Gao |
| collection | DOAJ |
| description | The traditional microscopic speckle interferometer has limited applications in engineering due to its small field of view. In this paper, we propose a large-field microscopic speckle interferometer which embeds two doublet lens groups in the improved Mach–Zehnder optical path structure to expand its field of view. At the same time, the new system can reduce the coherent noise of reflected light in the optical path. We use this new system to measure the dynamic displacement process of the entire surface of the microchips. The experimental results show that our improved measurement system can achieve large-field, real-time and high-precision dynamic measurement of micro-electromechanical systems (MEMS). |
| first_indexed | 2024-03-10T09:28:29Z |
| format | Article |
| id | doaj.art-a836b04fde5c45b9bb3f62b2452426cc |
| institution | Directory Open Access Journal |
| issn | 2304-6732 |
| language | English |
| last_indexed | 2024-03-10T09:28:29Z |
| publishDate | 2021-07-01 |
| publisher | MDPI AG |
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| series | Photonics |
| spelling | doaj.art-a836b04fde5c45b9bb3f62b2452426cc2023-11-22T04:42:23ZengMDPI AGPhotonics2304-67322021-07-018727110.3390/photonics8070271An Improved Large-Field Microscopic Speckle Interferometry System for Dynamic Displacement Measurement of MEMSChenjia Gao0Zhan Gao1Yuhao Niu2Xu Wang3Jieming Zhao4Lin Deng5Key Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing Jiaotong University, Beijing 100044, ChinaKey Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing Jiaotong University, Beijing 100044, ChinaKey Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing Jiaotong University, Beijing 100044, ChinaKey Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing Jiaotong University, Beijing 100044, ChinaKey Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing Jiaotong University, Beijing 100044, ChinaKey Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing Jiaotong University, Beijing 100044, ChinaThe traditional microscopic speckle interferometer has limited applications in engineering due to its small field of view. In this paper, we propose a large-field microscopic speckle interferometer which embeds two doublet lens groups in the improved Mach–Zehnder optical path structure to expand its field of view. At the same time, the new system can reduce the coherent noise of reflected light in the optical path. We use this new system to measure the dynamic displacement process of the entire surface of the microchips. The experimental results show that our improved measurement system can achieve large-field, real-time and high-precision dynamic measurement of micro-electromechanical systems (MEMS).https://www.mdpi.com/2304-6732/8/7/271large-fieldspeckle interferometerMEMSdisplacement measurement |
| spellingShingle | Chenjia Gao Zhan Gao Yuhao Niu Xu Wang Jieming Zhao Lin Deng An Improved Large-Field Microscopic Speckle Interferometry System for Dynamic Displacement Measurement of MEMS Photonics large-field speckle interferometer MEMS displacement measurement |
| title | An Improved Large-Field Microscopic Speckle Interferometry System for Dynamic Displacement Measurement of MEMS |
| title_full | An Improved Large-Field Microscopic Speckle Interferometry System for Dynamic Displacement Measurement of MEMS |
| title_fullStr | An Improved Large-Field Microscopic Speckle Interferometry System for Dynamic Displacement Measurement of MEMS |
| title_full_unstemmed | An Improved Large-Field Microscopic Speckle Interferometry System for Dynamic Displacement Measurement of MEMS |
| title_short | An Improved Large-Field Microscopic Speckle Interferometry System for Dynamic Displacement Measurement of MEMS |
| title_sort | improved large field microscopic speckle interferometry system for dynamic displacement measurement of mems |
| topic | large-field speckle interferometer MEMS displacement measurement |
| url | https://www.mdpi.com/2304-6732/8/7/271 |
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