Magnetron Sputter Epitaxy of High-Quality GaN Nanorods on Functional and Cost-Effective Templates/Substrates

Magnetron Sputter Epitaxy of High-Quality GaN Nanorods on Functional and Cost-Effective Templates/Substrates

We demonstrate the versatility of magnetron sputter epitaxy by achieving high-quality GaN nanorods on different substrate/template combinations, specifically Si, SiC, TiN/Si, ZrB2/Si, ZrB2/SiC, Mo, and Ti. Growth temperature was optimized on Si, TiN/Si, and ZrB2/Si, resulting in increased nanorod as...

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Bibliographic Details
Main Authors: Elena Alexandra Serban, Justinas Palisaitis, Muhammad Junaid, Lina Tengdelius, Hans Högberg, Lars Hultman, Per Ola Åke Persson, Jens Birch, Ching-Lien Hsiao
Format: Article
Language:English
Published: MDPI AG 2017-09-01
Series:Energies
Subjects:
GaN
nanorods
Si, SiC, Ti, Mo, TiN and ZrB2 templates
magnetron sputtering
epitaxy
Online Access:https://www.mdpi.com/1996-1073/10/9/1322

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https://www.mdpi.com/1996-1073/10/9/1322

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