Effect of Hydrogen Migration in SiO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> Stacked Gate Insulator of InGaZnO Thin-Film Transistors
In this work, the correlation between SiO<sub>2</sub> deposition thickness and hydrogen content is discussed and the effect of the SiO<sub>2</sub> layer on the properties of synaptic InGaZnO (IGZO) TFTs is analyzed. Three types of IGZO synaptic thin-film transistors (TFTs) we...
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Fformat: | Erthygl |
Iaith: | English |
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MDPI AG
2022-04-01
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Cyfres: | Crystals |
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Mynediad Ar-lein: | https://www.mdpi.com/2073-4352/12/5/594 |