Effect of Hydrogen Migration in SiO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> Stacked Gate Insulator of InGaZnO Thin-Film Transistors

In this work, the correlation between SiO<sub>2</sub> deposition thickness and hydrogen content is discussed and the effect of the SiO<sub>2</sub> layer on the properties of synaptic InGaZnO (IGZO) TFTs is analyzed. Three types of IGZO synaptic thin-film transistors (TFTs) we...

Disgrifiad llawn

Manylion Llyfryddiaeth
Prif Awduron: Shinyoung Park, Sangwook Youn, Jun Tae Jang, Hyungjin Kim, Dae Hwan Kim
Fformat: Erthygl
Iaith:English
Cyhoeddwyd: MDPI AG 2022-04-01
Cyfres:Crystals
Pynciau:
Mynediad Ar-lein:https://www.mdpi.com/2073-4352/12/5/594