Design and Optimization of an Al Doped ZnO in Si-Slot for Gas Sensing
A Silicon waveguide incorporating a vertical slot filled with Al<sup>+3</sup> doped ZnO is proposed for gas sensing. The effect of different device parameters, namely, slot-height, slot-width, and Si-width on two key optical features related to sensing, that is, difference in effective i...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2018-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8399488/ |