A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation
Alternating TiB<sub>2</sub>-dcMS and Cr-HiPIMS layers are used to fabricate TiB<sub>2</sub>/Cr multilayer films. Introducing a 5-nm-thick Cr interlayer deposited under a substrate bias of −60 V produces slight increases in both film hardness and elastic modulus. The TEM obser...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-11-01
|
| Series: | Magnetochemistry |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2312-7481/8/11/148 |