A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation

Alternating TiB<sub>2</sub>-dcMS and Cr-HiPIMS layers are used to fabricate TiB<sub>2</sub>/Cr multilayer films. Introducing a 5-nm-thick Cr interlayer deposited under a substrate bias of −60 V produces slight increases in both film hardness and elastic modulus. The TEM obser...

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গ্রন্থ-পঞ্জীর বিবরন
প্রধান লেখক: Simeng Chen, Zhengtao Wu, Qimin Wang
বিন্যাস: প্রবন্ধ
ভাষা:English
প্রকাশিত: MDPI AG 2022-11-01
মালা:Magnetochemistry
বিষয়গুলি:
অনলাইন ব্যবহার করুন:https://www.mdpi.com/2312-7481/8/11/148
বিবরন
সংক্ষিপ্ত:Alternating TiB<sub>2</sub>-dcMS and Cr-HiPIMS layers are used to fabricate TiB<sub>2</sub>/Cr multilayer films. Introducing a 5-nm-thick Cr interlayer deposited under a substrate bias of −60 V produces slight increases in both film hardness and elastic modulus. The TEM observation indicates that the Cr grains favor epitaxial growth on the TiB<sub>2</sub> interlayer, forming a coherent TiB<sub>2</sub>/Cr interface. This improves hardness. Mechanic measurement by using AFM illustrates that the coherent interface increases the elastic modulus of the Cr up to ~280 GPa, which is significantly higher than bulk material.
আইএসএসএন:2312-7481