A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation
Alternating TiB<sub>2</sub>-dcMS and Cr-HiPIMS layers are used to fabricate TiB<sub>2</sub>/Cr multilayer films. Introducing a 5-nm-thick Cr interlayer deposited under a substrate bias of −60 V produces slight increases in both film hardness and elastic modulus. The TEM obser...
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MDPI AG
2022-11-01
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Series: | Magnetochemistry |
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Online Access: | https://www.mdpi.com/2312-7481/8/11/148 |
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author | Simeng Chen Zhengtao Wu Qimin Wang |
author_facet | Simeng Chen Zhengtao Wu Qimin Wang |
author_sort | Simeng Chen |
collection | DOAJ |
description | Alternating TiB<sub>2</sub>-dcMS and Cr-HiPIMS layers are used to fabricate TiB<sub>2</sub>/Cr multilayer films. Introducing a 5-nm-thick Cr interlayer deposited under a substrate bias of −60 V produces slight increases in both film hardness and elastic modulus. The TEM observation indicates that the Cr grains favor epitaxial growth on the TiB<sub>2</sub> interlayer, forming a coherent TiB<sub>2</sub>/Cr interface. This improves hardness. Mechanic measurement by using AFM illustrates that the coherent interface increases the elastic modulus of the Cr up to ~280 GPa, which is significantly higher than bulk material. |
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format | Article |
id | doaj.art-a8baeafca3a640bc858acad2d3da65f8 |
institution | Directory Open Access Journal |
issn | 2312-7481 |
language | English |
last_indexed | 2024-03-09T18:55:03Z |
publishDate | 2022-11-01 |
publisher | MDPI AG |
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series | Magnetochemistry |
spelling | doaj.art-a8baeafca3a640bc858acad2d3da65f82023-11-24T05:33:53ZengMDPI AGMagnetochemistry2312-74812022-11-0181114810.3390/magnetochemistry8110148A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by IndentationSimeng Chen0Zhengtao Wu1Qimin Wang2School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, ChinaSchool of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, ChinaSchool of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, ChinaAlternating TiB<sub>2</sub>-dcMS and Cr-HiPIMS layers are used to fabricate TiB<sub>2</sub>/Cr multilayer films. Introducing a 5-nm-thick Cr interlayer deposited under a substrate bias of −60 V produces slight increases in both film hardness and elastic modulus. The TEM observation indicates that the Cr grains favor epitaxial growth on the TiB<sub>2</sub> interlayer, forming a coherent TiB<sub>2</sub>/Cr interface. This improves hardness. Mechanic measurement by using AFM illustrates that the coherent interface increases the elastic modulus of the Cr up to ~280 GPa, which is significantly higher than bulk material.https://www.mdpi.com/2312-7481/8/11/148TiB<sub>2</sub>/Crmultilayermechanical propertiescoherent interface |
spellingShingle | Simeng Chen Zhengtao Wu Qimin Wang A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation Magnetochemistry TiB<sub>2</sub>/Cr multilayer mechanical properties coherent interface |
title | A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation |
title_full | A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation |
title_fullStr | A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation |
title_full_unstemmed | A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation |
title_short | A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation |
title_sort | comparative investigation of mechanical properties of tib sub 2 sub cr multilayer film by indentation |
topic | TiB<sub>2</sub>/Cr multilayer mechanical properties coherent interface |
url | https://www.mdpi.com/2312-7481/8/11/148 |
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