A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation

Alternating TiB<sub>2</sub>-dcMS and Cr-HiPIMS layers are used to fabricate TiB<sub>2</sub>/Cr multilayer films. Introducing a 5-nm-thick Cr interlayer deposited under a substrate bias of −60 V produces slight increases in both film hardness and elastic modulus. The TEM obser...

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Main Authors: Simeng Chen, Zhengtao Wu, Qimin Wang
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Magnetochemistry
Subjects:
Online Access:https://www.mdpi.com/2312-7481/8/11/148
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author Simeng Chen
Zhengtao Wu
Qimin Wang
author_facet Simeng Chen
Zhengtao Wu
Qimin Wang
author_sort Simeng Chen
collection DOAJ
description Alternating TiB<sub>2</sub>-dcMS and Cr-HiPIMS layers are used to fabricate TiB<sub>2</sub>/Cr multilayer films. Introducing a 5-nm-thick Cr interlayer deposited under a substrate bias of −60 V produces slight increases in both film hardness and elastic modulus. The TEM observation indicates that the Cr grains favor epitaxial growth on the TiB<sub>2</sub> interlayer, forming a coherent TiB<sub>2</sub>/Cr interface. This improves hardness. Mechanic measurement by using AFM illustrates that the coherent interface increases the elastic modulus of the Cr up to ~280 GPa, which is significantly higher than bulk material.
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spelling doaj.art-a8baeafca3a640bc858acad2d3da65f82023-11-24T05:33:53ZengMDPI AGMagnetochemistry2312-74812022-11-0181114810.3390/magnetochemistry8110148A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by IndentationSimeng Chen0Zhengtao Wu1Qimin Wang2School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, ChinaSchool of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, ChinaSchool of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, ChinaAlternating TiB<sub>2</sub>-dcMS and Cr-HiPIMS layers are used to fabricate TiB<sub>2</sub>/Cr multilayer films. Introducing a 5-nm-thick Cr interlayer deposited under a substrate bias of −60 V produces slight increases in both film hardness and elastic modulus. The TEM observation indicates that the Cr grains favor epitaxial growth on the TiB<sub>2</sub> interlayer, forming a coherent TiB<sub>2</sub>/Cr interface. This improves hardness. Mechanic measurement by using AFM illustrates that the coherent interface increases the elastic modulus of the Cr up to ~280 GPa, which is significantly higher than bulk material.https://www.mdpi.com/2312-7481/8/11/148TiB<sub>2</sub>/Crmultilayermechanical propertiescoherent interface
spellingShingle Simeng Chen
Zhengtao Wu
Qimin Wang
A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation
Magnetochemistry
TiB<sub>2</sub>/Cr
multilayer
mechanical properties
coherent interface
title A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation
title_full A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation
title_fullStr A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation
title_full_unstemmed A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation
title_short A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation
title_sort comparative investigation of mechanical properties of tib sub 2 sub cr multilayer film by indentation
topic TiB<sub>2</sub>/Cr
multilayer
mechanical properties
coherent interface
url https://www.mdpi.com/2312-7481/8/11/148
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