A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation

A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation

Alternating TiB<sub>2</sub>-dcMS and Cr-HiPIMS layers are used to fabricate TiB<sub>2</sub>/Cr multilayer films. Introducing a 5-nm-thick Cr interlayer deposited under a substrate bias of −60 V produces slight increases in both film hardness and elastic modulus. The TEM obser...

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Bibliographic Details
Main Authors: Simeng Chen, Zhengtao Wu, Qimin Wang
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Magnetochemistry
Subjects:
TiB<sub>2</sub>/Cr
multilayer
mechanical properties
coherent interface
Online Access:https://www.mdpi.com/2312-7481/8/11/148

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