Comparison of Magnesium and Titanium Doping on Material Properties and pH Sensing Performance on Sb<sub>2</sub>O<sub>3</sub> Membranes in Electrolyte-Insulator-Semiconductor Structure
In this research, electrolyte-insulator-semiconductor (EIS) capacitors with Sb<sub>2</sub>O<sub>3</sub> sensing membranes were fabricated. The results indicate that Mg doping and Ti-doped Sb<sub>2</sub>O<sub>3</sub> membranes with appropriate annealing...
Main Authors: | , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-12-01
|
Series: | Membranes |
Subjects: | |
Online Access: | https://www.mdpi.com/2077-0375/12/1/25 |