Comparison of Magnesium and Titanium Doping on Material Properties and pH Sensing Performance on Sb<sub>2</sub>O<sub>3</sub> Membranes in Electrolyte-Insulator-Semiconductor Structure

In this research, electrolyte-insulator-semiconductor (EIS) capacitors with Sb<sub>2</sub>O<sub>3</sub> sensing membranes were fabricated. The results indicate that Mg doping and Ti-doped Sb<sub>2</sub>O<sub>3</sub> membranes with appropriate annealing...

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Bibliographic Details
Main Authors: Chyuan-Haur Kao, Kuan-Lin Chen, Jun-Ru Chen, Shih-Ming Chen, Yaw-Wen Kuo, Ming-Ling Lee, Lukas Jyuhn-Hsiarn Lee, Hsiang Chen
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Membranes
Subjects:
Online Access:https://www.mdpi.com/2077-0375/12/1/25