Investigation of Cylindrical Piezoelectric and Specific Multi-Channel Circular MEMS-Transducer Array Resonator of Ultrasonic Ablation

Background: A cylindrical piezoelectric element and a specific multi-channel circular microelectromechanical systems (MEMS)-transducer array of ultrasonic system were used for ultrasonic energy generation and ablation. A relatively long time is required for the heat to be conducted to the target pos...

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Bibliographic Details
Main Authors: Jian-Chiun Liou, Chih-Wei Peng, Zhen-Xi Chen
Format: Article
Language:English
Published: MDPI AG 2021-03-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/12/4/371