Investigation of Cylindrical Piezoelectric and Specific Multi-Channel Circular MEMS-Transducer Array Resonator of Ultrasonic Ablation
Background: A cylindrical piezoelectric element and a specific multi-channel circular microelectromechanical systems (MEMS)-transducer array of ultrasonic system were used for ultrasonic energy generation and ablation. A relatively long time is required for the heat to be conducted to the target pos...
Main Authors: | Jian-Chiun Liou, Chih-Wei Peng, Zhen-Xi Chen |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-03-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/12/4/371 |
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