Effects of Thermal Oxidation on Sensing Properties of Porous Silicon
We report the effects of thermal oxidation on the sensing properties of porous silicon. Porous silicon substrates were prepared by electrochemical etching and thermally oxidized at different temperatures. A comparative EDS analysis shows that porous surfaces oxidized at higher temperatures have high...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-08-01
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| Series: | Chemosensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2227-9040/10/9/349 |