Effects of Thermal Oxidation on Sensing Properties of Porous Silicon

Effects of Thermal Oxidation on Sensing Properties of Porous Silicon

We report the effects of thermal oxidation on the sensing properties of porous silicon. Porous silicon substrates were prepared by electrochemical etching and thermally oxidized at different temperatures. A comparative EDS analysis shows that porous surfaces oxidized at higher temperatures have high...

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Bibliographic Details
Main Authors: Nikola Baran, Sanja Renka, Matea Raić, Davor Ristić, Mile Ivanda
Format: Article
Language:English
Published: MDPI AG 2022-08-01
Series:Chemosensors
Subjects:
porous silicon
gas sensing
VOC
oxidation
Online Access:https://www.mdpi.com/2227-9040/10/9/349

Internet

https://www.mdpi.com/2227-9040/10/9/349

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