Characterization of nanoscale atomic motion of Si in polycrystalline Cu layer

Atomic migration of silicon through grain boundaries of a thin polycrystalline Cu film and island formation on the Cu surface were studied in the temperature range of 403–520 K. Samples used in these experiments was prepared on Si(111) wafers by room temperature magnetron sputtering and they consist...

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Bibliographic Details
Main Authors: Viktor Takáts, Eszter Bodnár, Yuri Kaganovskii, Tamás Fodor, József Hakl, Sándor Molnár, Márton Soha, Kálmán Vad
Format: Article
Language:English
Published: Elsevier 2024-02-01
Series:Heliyon
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2405844024015470