HiPIMS co-sputtering for the increase of the mechanical properties of arc deposited TiN coatings
Relatively few studies have addressed the use of vacuum arc evaporation (VAE) in conjunction with high-power impulse magnetron sputtering (HiPIMS), due to differences in the respective pressure requirements. This paper describes the use of HiPIMS-enhanced VAE (HEVAE) technology for the deposition of...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-09-01
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| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785423018823 |