β-Ga2O3 Deposited via MOCVD for Mid-Infrared Polarization Control
We performed infrared optical characterization of polycrystalline β-Ga2O3 films, in the 10-18 μm range, deposited by metal organic chemical vapor deposition on sapphire substrates. Our results show that it is possible to obtain a dominant β-phase film, with a well-defined, normal to surface z-axis o...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2023-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2023/13/epjconf_eosam2023_05042.pdf |