Temperature Performance Study of SAW Sensors Based on AlN and AlScN
In this paper, the temperature performance of AlN-SAW resonators and AlScN-SAW resonators is studied. They are simulated by COMSOL Multiphysics, and their modes and the S11 curve are analyzed. The two devices were fabricated using MEMS technology and tested using VNA, and the test results were consi...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-05-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/5/1065 |