Comprehensive Study of Inversion Capacitance in Metal-Insulator-Semiconductor Capacitor With Existing Oxide Charges

Comprehensive Study of Inversion Capacitance in Metal-Insulator-Semiconductor Capacitor With Existing Oxide Charges

The impact of oxide charges on the metal-insulator-semiconductor (MIS) device’s capacitance <inline-formula> <tex-math notation="LaTeX">$({C})$ </tex-math></inline-formula> and conductance <inline-formula> <tex-math notation="LaTeX">...

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Bibliographic Details
Main Authors:	Kung-Chu Chen, Kuan-Wun Lin, Sung-Wei Huang, Jian-Yu Lin, Jenn-Gwo Hwu
Format:	Article
Language:	English
Published:	IEEE 2022-01-01
Series:	IEEE Journal of the Electron Devices Society
Subjects:	metal-insulator-semiconductor (MIS) oxide charges
Online Access:	https://ieeexplore.ieee.org/document/9924232/

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