Optical properties of low-energy Ag ion implanted monocrystalline silicon

Optical properties of low-energy Ag ion implanted monocrystalline silicon

The present paper investigates the effects of low-energy silver ions implantation on the optical properties of monocrystalline silicon. Si(100) wafers were implanted with 60 keV Ag ions, to the fluences in the range of 1×1013-1×1016 ions/cm2. Composition of the implanted Si samples was analysed by m...

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Bibliographic Details
Main Authors: Modrić-Šahbazović Almedina H., Novaković Mirjana M., Bibić Nataša M., Gazdić Izet M., Rakočević Zlatko Lj.
Format: Article
Language:English
Published: Savez inženjera i tehničara Srbije 2018-01-01
Series:Tehnika
Subjects:
SPR effect
silicon
silver nanoparticles
ion implantation
Online Access:https://scindeks-clanci.ceon.rs/data/pdf/0040-2176/2018/0040-21761803325M.pdf

Internet

https://scindeks-clanci.ceon.rs/data/pdf/0040-2176/2018/0040-21761803325M.pdf

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