DERIVATIZATION OF PHOTOACTIVE STRUCTURES SI(N+)/SI(P)/SI(P+) THROUGH ION-BEAM CRYSTALLIZATION
The physical and mathematical mass-transfer model of the ion-beam crystallization method is developed. The derivatization of photoactive structures Si(n+)/Si(p)/Si(p+) on 100 mm substrates through ion-beam crystallization is considered. The optimum conditions for the process: residual pressure in th...
| প্রধান লেখক: | , , , |
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| বিন্যাস: | প্রবন্ধ |
| ভাষা: | Russian |
| প্রকাশিত: |
Don State Technical University
2013-09-01
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| মালা: | Advanced Engineering Research |
| বিষয়গুলি: | |
| অনলাইন ব্যবহার করুন: | https://www.vestnik-donstu.ru/jour/article/view/419 |