Effects caused by degeneration of natural frequency for pneumatic isolated table with two degrees-of-freedom
In this paper, it is confirmed that natural frequency of isolated table is operated and that degeneration, which means that some natural frequencies have the same value, has a bad influence. Pneumatic anti vibration apparatuses (AVAs) support that loaded devices, i.e., XY stages, operate accurately....
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2018-05-01
|
| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/84/862/84_18-00052/_pdf/-char/en |