Morphology and Corrosion Behavior Study of Thin TiN Films Deposited at Different Substrates by DC Magnetron Sputtering

Morphology and Corrosion Behavior Study of Thin TiN Films Deposited at Different Substrates by DC Magnetron Sputtering

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<p>TiN thin films have been deposited by magnetron sputtering (DC) method under pure argon (100% Ar) gas for different times at 100 <sup>o</sup>C temperature. Additionally, three substrate types have been used: Low Carbon Steel (LCS), Stainless Steel (SS304) and Silicon of (100) or...

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Bibliographic Details
Main Authors: Bassam Abdallah, M. Kakhia, W. Alsadat, W. Zetun, A. Hijazy
Format: Article
Language:English
Published: Universidade Federal de Mato Grosso do Sul 2021-03-01
Series:Orbital: The Electronic Journal of Chemistry
Subjects:
tin film
dc magnetron sputtering
morphology
corrosion behavior
Online Access:http://orbital.ufms.br/index.php/Chemistry/article/view/1577

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http://orbital.ufms.br/index.php/Chemistry/article/view/1577

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