Investigation of composition and origin of the intermediate layers at the Ga2O3/AlN and Ga2O3/Al2O3 interfaces

Bibliographic Details
Main Authors:	Schowalter Marco, Raghuvansy S., Karg A., Vogt P., Schlom D., Jena D., Eickhoff M., Rosenauer A.
Format:	Article
Language:	English
Published:	EDP Sciences 2024-01-01
Series:	BIO Web of Conferences
Subjects:	composition determination dft ga2o3
Online Access:	https://www.bio-conferences.org/articles/bioconf/pdf/2024/48/bioconf_emc2024_24042.pdf

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