Particulate reduction in ternary-compound film growth via pulsed laser deposition from segmented binary-targets

Particulate reduction in ternary-compound film growth via pulsed laser deposition from segmented binary-targets

We present the hetero-epitaxial growth of high-quality crystalline Y _3 Ga _5 O _12 onto a 〈100〉-oriented YAG substrate via pulsed laser deposition, using mixed ternary-compound and segmented binary-compound targets. We observe that a Y _3 Ga _5 O _12 film fabricated using a segmented target (Y _2 O...

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Bibliographic Details
Main Authors: James A Grant-Jacob, Jake J Prentice, Stephen J Beecher, David P Shepherd, Robert W Eason, Jacob I Mackenzie
Format: Article
Language:English
Published: IOP Publishing 2018-01-01
Series:Materials Research Express
Subjects:
pulsed laser deposition
crystal structure
surface structure
thin films
ceramic target
81.15.Fg
Online Access:https://doi.org/10.1088/2053-1591/aab0ef

Internet

https://doi.org/10.1088/2053-1591/aab0ef

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