Particulate reduction in ternary-compound film growth via pulsed laser deposition from segmented binary-targets
We present the hetero-epitaxial growth of high-quality crystalline Y _3 Ga _5 O _12 onto a 〈100〉-oriented YAG substrate via pulsed laser deposition, using mixed ternary-compound and segmented binary-compound targets. We observe that a Y _3 Ga _5 O _12 film fabricated using a segmented target (Y _2 O...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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IOP Publishing
2018-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/aab0ef |
| _version_ | 1797747166963302400 |
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| author | James A Grant-Jacob Jake J Prentice Stephen J Beecher David P Shepherd Robert W Eason Jacob I Mackenzie |
| author_facet | James A Grant-Jacob Jake J Prentice Stephen J Beecher David P Shepherd Robert W Eason Jacob I Mackenzie |
| author_sort | James A Grant-Jacob |
| collection | DOAJ |
| description | We present the hetero-epitaxial growth of high-quality crystalline Y _3 Ga _5 O _12 onto a 〈100〉-oriented YAG substrate via pulsed laser deposition, using mixed ternary-compound and segmented binary-compound targets. We observe that a Y _3 Ga _5 O _12 film fabricated using a segmented target (Y _2 O _3 /Ga _2 O _3 ) contained ∼100 times fewer scattering points than a film grown using a mixed Y _3 Ga _5 O _12 target. We show that following ablation, the surface of the mixed compound (ternary) target had laser-induced cone structures, whereas the surface of single compound (binary) targets did not. It is concluded that the different ablation dynamics of the oxide constituents in the respective targets plays a significant role in the origin of the scattering points in the resultant films. |
| first_indexed | 2024-03-12T15:48:10Z |
| format | Article |
| id | doaj.art-aa5328d8acf34d798b682bf5a467c270 |
| institution | Directory Open Access Journal |
| issn | 2053-1591 |
| language | English |
| last_indexed | 2024-03-12T15:48:10Z |
| publishDate | 2018-01-01 |
| publisher | IOP Publishing |
| record_format | Article |
| series | Materials Research Express |
| spelling | doaj.art-aa5328d8acf34d798b682bf5a467c2702023-08-09T15:21:36ZengIOP PublishingMaterials Research Express2053-15912018-01-015303640210.1088/2053-1591/aab0efParticulate reduction in ternary-compound film growth via pulsed laser deposition from segmented binary-targetsJames A Grant-Jacob0https://orcid.org/0000-0002-4270-4247Jake J Prentice1Stephen J Beecher2David P Shepherd3Robert W Eason4Jacob I Mackenzie5Optoelectronics Research Centre, University of Southampton , Southampton, SO17 1BJ, United KingdomOptoelectronics Research Centre, University of Southampton , Southampton, SO17 1BJ, United KingdomOptoelectronics Research Centre, University of Southampton , Southampton, SO17 1BJ, United KingdomOptoelectronics Research Centre, University of Southampton , Southampton, SO17 1BJ, United KingdomOptoelectronics Research Centre, University of Southampton , Southampton, SO17 1BJ, United KingdomOptoelectronics Research Centre, University of Southampton , Southampton, SO17 1BJ, United KingdomWe present the hetero-epitaxial growth of high-quality crystalline Y _3 Ga _5 O _12 onto a 〈100〉-oriented YAG substrate via pulsed laser deposition, using mixed ternary-compound and segmented binary-compound targets. We observe that a Y _3 Ga _5 O _12 film fabricated using a segmented target (Y _2 O _3 /Ga _2 O _3 ) contained ∼100 times fewer scattering points than a film grown using a mixed Y _3 Ga _5 O _12 target. We show that following ablation, the surface of the mixed compound (ternary) target had laser-induced cone structures, whereas the surface of single compound (binary) targets did not. It is concluded that the different ablation dynamics of the oxide constituents in the respective targets plays a significant role in the origin of the scattering points in the resultant films.https://doi.org/10.1088/2053-1591/aab0efpulsed laser depositioncrystal structuresurface structurethin filmsceramic target81.15.Fg |
| spellingShingle | James A Grant-Jacob Jake J Prentice Stephen J Beecher David P Shepherd Robert W Eason Jacob I Mackenzie Particulate reduction in ternary-compound film growth via pulsed laser deposition from segmented binary-targets Materials Research Express pulsed laser deposition crystal structure surface structure thin films ceramic target 81.15.Fg |
| title | Particulate reduction in ternary-compound film growth via pulsed laser deposition from segmented binary-targets |
| title_full | Particulate reduction in ternary-compound film growth via pulsed laser deposition from segmented binary-targets |
| title_fullStr | Particulate reduction in ternary-compound film growth via pulsed laser deposition from segmented binary-targets |
| title_full_unstemmed | Particulate reduction in ternary-compound film growth via pulsed laser deposition from segmented binary-targets |
| title_short | Particulate reduction in ternary-compound film growth via pulsed laser deposition from segmented binary-targets |
| title_sort | particulate reduction in ternary compound film growth via pulsed laser deposition from segmented binary targets |
| topic | pulsed laser deposition crystal structure surface structure thin films ceramic target 81.15.Fg |
| url | https://doi.org/10.1088/2053-1591/aab0ef |
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