The research of process of CdTe passivation coverings formation on epitaxial layers CdхHg1-хTe for creation of IRphotodetectors.
The features of formation passivation coverings of cadmium telluride on epitaxial layers CdхНg1-хТе used for manufacturing of matrix photodetectors of the IR-range are investigated. The laws of process of passivation coverings creation by a method of «the hot wall » are established at unitary and re...
Main Authors: | , , , |
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Format: | Article |
Language: | Russian |
Published: |
MIREA - Russian Technological University
2007-10-01
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Series: | Тонкие химические технологии |
Online Access: | https://www.finechem-mirea.ru/jour/article/view/1343 |