Channel Defect Profiling and Passivation for ZnO Thin-Film Transistors

The electrical characteristics of Zinc oxide (ZnO) thin-film transistors are analyzed to apprehend the effects of oxygen vacancies after vacuum treatment. The energy level of the oxygen vacancies was found to be located near the conduction band of ZnO, which contributed to the increase in drain curr...

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Main Authors: Soo Cheol Kang, So Young Kim, Sang Kyung Lee, Kiyung Kim, Billal Allouche, Hyeon Jun Hwang, Byoung Hun Lee
Format: Article
Language:English
Published: MDPI AG 2020-06-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/10/6/1186
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author Soo Cheol Kang
So Young Kim
Sang Kyung Lee
Kiyung Kim
Billal Allouche
Hyeon Jun Hwang
Byoung Hun Lee
author_facet Soo Cheol Kang
So Young Kim
Sang Kyung Lee
Kiyung Kim
Billal Allouche
Hyeon Jun Hwang
Byoung Hun Lee
author_sort Soo Cheol Kang
collection DOAJ
description The electrical characteristics of Zinc oxide (ZnO) thin-film transistors are analyzed to apprehend the effects of oxygen vacancies after vacuum treatment. The energy level of the oxygen vacancies was found to be located near the conduction band of ZnO, which contributed to the increase in drain current (I<sub>D</sub>) via trap-assisted tunneling when the gate voltage (V<sub>G</sub>) is lower than the specific voltage associated with the trap level. The oxygen vacancies were successfully passivated after the annealing of ZnO in oxygen ambient. We determined that the trap-induced Schottky barrier lowering reduced a drain barrier when the drain was subjected to negative bias stress. Consequentially, the field effect mobility increased from 8.5 m<sup>2</sup> V<sup>−1</sup>·s<sup>−1</sup> to 8.9 m<sup>2</sup> V<sup>−1</sup>·s<sup>−1</sup> and on-current increased by ~13%.
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spelling doaj.art-aa707325e2a841a88c3191664614b8df2023-11-20T04:15:52ZengMDPI AGNanomaterials2079-49912020-06-01106118610.3390/nano10061186Channel Defect Profiling and Passivation for ZnO Thin-Film TransistorsSoo Cheol Kang0So Young Kim1Sang Kyung Lee2Kiyung Kim3Billal Allouche4Hyeon Jun Hwang5Byoung Hun Lee6Center for Emerging Electronic Devices and Systems (CEEDS), Gwangju 61005, KoreaCenter for Emerging Electronic Devices and Systems (CEEDS), Gwangju 61005, KoreaCenter for Emerging Electronic Devices and Systems (CEEDS), Gwangju 61005, KoreaCenter for Emerging Electronic Devices and Systems (CEEDS), Gwangju 61005, KoreaCenter for Emerging Electronic Devices and Systems (CEEDS), Gwangju 61005, KoreaCenter for Emerging Electronic Devices and Systems (CEEDS), Gwangju 61005, KoreaCenter for Emerging Electronic Devices and Systems (CEEDS), Gwangju 61005, KoreaThe electrical characteristics of Zinc oxide (ZnO) thin-film transistors are analyzed to apprehend the effects of oxygen vacancies after vacuum treatment. The energy level of the oxygen vacancies was found to be located near the conduction band of ZnO, which contributed to the increase in drain current (I<sub>D</sub>) via trap-assisted tunneling when the gate voltage (V<sub>G</sub>) is lower than the specific voltage associated with the trap level. The oxygen vacancies were successfully passivated after the annealing of ZnO in oxygen ambient. We determined that the trap-induced Schottky barrier lowering reduced a drain barrier when the drain was subjected to negative bias stress. Consequentially, the field effect mobility increased from 8.5 m<sup>2</sup> V<sup>−1</sup>·s<sup>−1</sup> to 8.9 m<sup>2</sup> V<sup>−1</sup>·s<sup>−1</sup> and on-current increased by ~13%.https://www.mdpi.com/2079-4991/10/6/1186ZnO thin-film transistorsoxygen vacancyvacuum treatmentoxygen annealingtrap-induced Schottky barrier lowering
spellingShingle Soo Cheol Kang
So Young Kim
Sang Kyung Lee
Kiyung Kim
Billal Allouche
Hyeon Jun Hwang
Byoung Hun Lee
Channel Defect Profiling and Passivation for ZnO Thin-Film Transistors
Nanomaterials
ZnO thin-film transistors
oxygen vacancy
vacuum treatment
oxygen annealing
trap-induced Schottky barrier lowering
title Channel Defect Profiling and Passivation for ZnO Thin-Film Transistors
title_full Channel Defect Profiling and Passivation for ZnO Thin-Film Transistors
title_fullStr Channel Defect Profiling and Passivation for ZnO Thin-Film Transistors
title_full_unstemmed Channel Defect Profiling and Passivation for ZnO Thin-Film Transistors
title_short Channel Defect Profiling and Passivation for ZnO Thin-Film Transistors
title_sort channel defect profiling and passivation for zno thin film transistors
topic ZnO thin-film transistors
oxygen vacancy
vacuum treatment
oxygen annealing
trap-induced Schottky barrier lowering
url https://www.mdpi.com/2079-4991/10/6/1186
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