High-Pressure Sensors Based on Laser-Manufactured Sintered Silicon Carbide
In this work Sintered Silicon Carbide (S-SiC) samples have been used to fabricate fiber-optic-coupled pressure sensors. The sensor structure reproduces a low-finesse Fabry–Perot (FP) interferometer. Laser manufacturing of cylindrical S-SiC samples was performed to define the thin membrane geometry o...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-10-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/10/20/7095 |