High-Pressure Sensors Based on Laser-Manufactured Sintered Silicon Carbide
In this work Sintered Silicon Carbide (S-SiC) samples have been used to fabricate fiber-optic-coupled pressure sensors. The sensor structure reproduces a low-finesse Fabry–Perot (FP) interferometer. Laser manufacturing of cylindrical S-SiC samples was performed to define the thin membrane geometry o...
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| Format: | Article |
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MDPI AG
2020-10-01
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| Series: | Applied Sciences |
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| Online Access: | https://www.mdpi.com/2076-3417/10/20/7095 |
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| author | Stefano Salvatori Gennaro Salvatore Ponticelli Sara Pettinato Silvio Genna Stefano Guarino |
| author_facet | Stefano Salvatori Gennaro Salvatore Ponticelli Sara Pettinato Silvio Genna Stefano Guarino |
| author_sort | Stefano Salvatori |
| collection | DOAJ |
| description | In this work Sintered Silicon Carbide (S-SiC) samples have been used to fabricate fiber-optic-coupled pressure sensors. The sensor structure reproduces a low-finesse Fabry–Perot (FP) interferometer. Laser manufacturing of cylindrical S-SiC samples was performed to define the thin membrane geometry of sensors. FP cavity is defined by the end-face of a single mode fiber and the S-SiC diaphragm surface. Hence, pressure is evaluated by measuring the cavity depth by a dedicated optoelectronic system coupled to the single mode fiber. Exploiting the excellent properties of S-SiC, in terms of high hardness, low thermal expansion, and high thermal conductivity, realized devices have been characterized up to 20 MPa. Experimental results demonstrate that produced sensors exhibit a non-linearity around ±0.6%F.S. and a high input dynamics. The all-optic sensing system proposed in this work would represent a good alternative to conventional solutions based on piezoelectric effects, overcoming the drawback related to electromagnetic interference on the acquired signals. In addition, the mechanical characteristics of S-SiC allow the use of the sensor in both automotive and aerospace hostile environments as pressure monitors in combustion engines. |
| first_indexed | 2024-03-10T15:41:41Z |
| format | Article |
| id | doaj.art-aa8e1f51e78b4a48b576bdeeab3c1f8a |
| institution | Directory Open Access Journal |
| issn | 2076-3417 |
| language | English |
| last_indexed | 2024-03-10T15:41:41Z |
| publishDate | 2020-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Applied Sciences |
| spelling | doaj.art-aa8e1f51e78b4a48b576bdeeab3c1f8a2023-11-20T16:48:23ZengMDPI AGApplied Sciences2076-34172020-10-011020709510.3390/app10207095High-Pressure Sensors Based on Laser-Manufactured Sintered Silicon CarbideStefano Salvatori0Gennaro Salvatore Ponticelli1Sara Pettinato2Silvio Genna3Stefano Guarino4Engineering Faculty, Niccolò Cusano University, Via don Gnocchi 3, 00166 Rome, ItalyEngineering Faculty, Niccolò Cusano University, Via don Gnocchi 3, 00166 Rome, ItalyEngineering Faculty, Niccolò Cusano University, Via don Gnocchi 3, 00166 Rome, ItalyEnterprise Engineering Department, University Tor Vergata, Via del Politecnico 1, 00133 Rome, ItalyEngineering Faculty, Niccolò Cusano University, Via don Gnocchi 3, 00166 Rome, ItalyIn this work Sintered Silicon Carbide (S-SiC) samples have been used to fabricate fiber-optic-coupled pressure sensors. The sensor structure reproduces a low-finesse Fabry–Perot (FP) interferometer. Laser manufacturing of cylindrical S-SiC samples was performed to define the thin membrane geometry of sensors. FP cavity is defined by the end-face of a single mode fiber and the S-SiC diaphragm surface. Hence, pressure is evaluated by measuring the cavity depth by a dedicated optoelectronic system coupled to the single mode fiber. Exploiting the excellent properties of S-SiC, in terms of high hardness, low thermal expansion, and high thermal conductivity, realized devices have been characterized up to 20 MPa. Experimental results demonstrate that produced sensors exhibit a non-linearity around ±0.6%F.S. and a high input dynamics. The all-optic sensing system proposed in this work would represent a good alternative to conventional solutions based on piezoelectric effects, overcoming the drawback related to electromagnetic interference on the acquired signals. In addition, the mechanical characteristics of S-SiC allow the use of the sensor in both automotive and aerospace hostile environments as pressure monitors in combustion engines.https://www.mdpi.com/2076-3417/10/20/7095Fabry–Perot cavityhigh-pressure measurementharsh environmentSintered Silicon Carbide Ceramicslaser manufacturing |
| spellingShingle | Stefano Salvatori Gennaro Salvatore Ponticelli Sara Pettinato Silvio Genna Stefano Guarino High-Pressure Sensors Based on Laser-Manufactured Sintered Silicon Carbide Applied Sciences Fabry–Perot cavity high-pressure measurement harsh environment Sintered Silicon Carbide Ceramics laser manufacturing |
| title | High-Pressure Sensors Based on Laser-Manufactured Sintered Silicon Carbide |
| title_full | High-Pressure Sensors Based on Laser-Manufactured Sintered Silicon Carbide |
| title_fullStr | High-Pressure Sensors Based on Laser-Manufactured Sintered Silicon Carbide |
| title_full_unstemmed | High-Pressure Sensors Based on Laser-Manufactured Sintered Silicon Carbide |
| title_short | High-Pressure Sensors Based on Laser-Manufactured Sintered Silicon Carbide |
| title_sort | high pressure sensors based on laser manufactured sintered silicon carbide |
| topic | Fabry–Perot cavity high-pressure measurement harsh environment Sintered Silicon Carbide Ceramics laser manufacturing |
| url | https://www.mdpi.com/2076-3417/10/20/7095 |
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