Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs) are used as the se...

Full description

Bibliographic Details
Main Authors: Zhikang Li, Libo Zhao, Zhuangde Jiang, Sina Akhbari, Jianjun Ding, Yihe Zhao, Yulong Zhao, Liwei Lin
Format: Article
Language:English
Published: AIP Publishing LLC 2015-12-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4939217

Internet

http://dx.doi.org/10.1063/1.4939217

Similar Items