Accurate Prediction and Reliable Parameter Optimization of Neural Network for Semiconductor Process Monitoring and Technology Development

Accurate Prediction and Reliable Parameter Optimization of Neural Network for Semiconductor Process Monitoring and Technology Development

Herein, novel neural network (NN) methods that improve prediction accuracy and reduce output variance of the optimized input in the gradient method for cross‐sectional data are proposed, and the variability evaluation approach of optimized inputs in the semiconductor process is suggested. Specifical...

Полное описание

Библиографические подробности
Главные авторы:	Hyeok Yun, Chang-Hyeon An, Hyundong Jang, Kyeongrae Cho, Jeong-Sik Lee, Seungjoon Eom, Choong-Ki Kim, Min-Soo Yoo, Hyun-Chul Choi, Rock-Hyun Baek
Формат:	Статья
Язык:	English
Опубликовано:	Wiley 2023-09-01
Серии:	Advanced Intelligent Systems
Предметы:	gradient descent method holistic parameter optimization machine learning network ensemble neural networks semiconductor manufacturing
Online-ссылка:	https://doi.org/10.1002/aisy.202300089

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