A High-Temperature MEMS Surface Fence for Wall-Shear-Stress Measurement in Scramjet Flow

A new variant of MEMS surface fence is proposed for shear-stress estimation under high-speed, high-temperature flow conditions. Investigation of high-temperature resistance including heat-resistant mechanism and process, in conjunction with high-temperature packaging design, enable the sensor to be...

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Bibliographic Details
Main Authors: Chengyu Ma, Binghe Ma, Jinjun Deng, Weizheng Yuan, Zitong Zhou, Han Zhang
Format: Article
Language:English
Published: MDPI AG 2017-10-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/17/10/2412