Plasma-Surface Interactions Within Helicon Plasma Sources
Helicon plasma sources do not require electrodes or grids directly immersed in the plasma, and also present an axial magnetic field confining the plasma discharge. These factors are believed to provide them with long operational lifetimes because of the reduced potential for surface etching. The phy...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2022-04-01
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| Series: | Frontiers in Physics |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fphy.2022.856221/full |