Periodical structure of vortices in a semiconductor single wafer spin cleaner

Periodical structure of vortices in a semiconductor single wafer spin cleaner

We experimentally and numerically investigated large-scale structures formed by vortices in a single wafer spin cleaner. The Q-criterion identified the vortices developed in the cleaner as the flow regions with positive second invariant of the velocity gradient tensor obtained by both the PIV and LE...

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Bibliographic Details
Main Authors: Toshinori KOUCHI, Naoya FUKUDA, Yusuke NAKANO, Yoshiya SHIMIZU, Yasunori NAGATA, Shinichiro YANASE
Format: Article
Language:Japanese
Published: The Japan Society of Mechanical Engineers 2015-08-01
Series:Nihon Kikai Gakkai ronbunshu
Subjects:
rotating disk
flow stability
large-scale structure
piv
les
Online Access:https://www.jstage.jst.go.jp/article/transjsme/81/829/81_15-00273/_pdf/-char/en

Internet

https://www.jstage.jst.go.jp/article/transjsme/81/829/81_15-00273/_pdf/-char/en

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