Ultra-High Sensitivity Zinc Oxide Nanocombs for On-Chip Room Temperature Carbon Monoxide Sensing
In this paper, we report an on-chip gas sensor based on novel zinc oxide (ZnO) nanocombs for carbon monoxide (CO) sensing. With ZnO gas sensing nanocombs fully integrated on a single silicon chip, the concept of low cost complementary-metal-oxide-semiconductor (CMOS) microsensor capable of on-chip g...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2015-04-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/15/4/8919 |