Ultra-High Sensitivity Zinc Oxide Nanocombs for On-Chip Room Temperature Carbon Monoxide Sensing
In this paper, we report an on-chip gas sensor based on novel zinc oxide (ZnO) nanocombs for carbon monoxide (CO) sensing. With ZnO gas sensing nanocombs fully integrated on a single silicon chip, the concept of low cost complementary-metal-oxide-semiconductor (CMOS) microsensor capable of on-chip g...
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| Format: | Article |
| Language: | English |
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MDPI AG
2015-04-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/15/4/8919 |
| _version_ | 1811306642026790912 |
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| author | Xiaofang Pan Xiaojin Zhao |
| author_facet | Xiaofang Pan Xiaojin Zhao |
| author_sort | Xiaofang Pan |
| collection | DOAJ |
| description | In this paper, we report an on-chip gas sensor based on novel zinc oxide (ZnO) nanocombs for carbon monoxide (CO) sensing. With ZnO gas sensing nanocombs fully integrated on a single silicon chip, the concept of low cost complementary-metal-oxide-semiconductor (CMOS) microsensor capable of on-chip gas sensing and processing is enabled. Compared with all previous implementations, the proposed ZnO nanocombs feature much larger effective sensing area and exhibit ultra-high sensitivity even at the room temperature. Specifically, at room temperature, we demonstrate peak sensitivities as high as 7.22 and 8.93 for CO concentrations of 250 ppm and 500 ppm, respectively. As a result, by operating the proposed ZnO-nanocomb-based gas sensor at the room temperature, the widely adopted power consuming heating components are completely removed. This leads to not only great power saving, but also full compatibility between the gas sensor and the on-chip circuitry in term of acceptable operating temperature. In addition, the reported fast response/recovery time of ~200 s/~50 s (250 ppm CO) makes it well suited to real-life applications. |
| first_indexed | 2024-04-13T08:49:07Z |
| format | Article |
| id | doaj.art-abf02aadcfd0423fb774e2f75664fcfe |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-13T08:49:07Z |
| publishDate | 2015-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-abf02aadcfd0423fb774e2f75664fcfe2022-12-22T02:53:33ZengMDPI AGSensors1424-82202015-04-011548919893010.3390/s150408919s150408919Ultra-High Sensitivity Zinc Oxide Nanocombs for On-Chip Room Temperature Carbon Monoxide SensingXiaofang Pan0Xiaojin Zhao1College of Information Engineering, Shenzhen University, Shenzhen 518060, ChinaCollege of Electronic Science and Technology, Shenzhen University, Shenzhen 518060, ChinaIn this paper, we report an on-chip gas sensor based on novel zinc oxide (ZnO) nanocombs for carbon monoxide (CO) sensing. With ZnO gas sensing nanocombs fully integrated on a single silicon chip, the concept of low cost complementary-metal-oxide-semiconductor (CMOS) microsensor capable of on-chip gas sensing and processing is enabled. Compared with all previous implementations, the proposed ZnO nanocombs feature much larger effective sensing area and exhibit ultra-high sensitivity even at the room temperature. Specifically, at room temperature, we demonstrate peak sensitivities as high as 7.22 and 8.93 for CO concentrations of 250 ppm and 500 ppm, respectively. As a result, by operating the proposed ZnO-nanocomb-based gas sensor at the room temperature, the widely adopted power consuming heating components are completely removed. This leads to not only great power saving, but also full compatibility between the gas sensor and the on-chip circuitry in term of acceptable operating temperature. In addition, the reported fast response/recovery time of ~200 s/~50 s (250 ppm CO) makes it well suited to real-life applications.http://www.mdpi.com/1424-8220/15/4/8919room temperatureCO gas sensorCMOS compatibleultra-high sensitivity |
| spellingShingle | Xiaofang Pan Xiaojin Zhao Ultra-High Sensitivity Zinc Oxide Nanocombs for On-Chip Room Temperature Carbon Monoxide Sensing Sensors room temperature CO gas sensor CMOS compatible ultra-high sensitivity |
| title | Ultra-High Sensitivity Zinc Oxide Nanocombs for On-Chip Room Temperature Carbon Monoxide Sensing |
| title_full | Ultra-High Sensitivity Zinc Oxide Nanocombs for On-Chip Room Temperature Carbon Monoxide Sensing |
| title_fullStr | Ultra-High Sensitivity Zinc Oxide Nanocombs for On-Chip Room Temperature Carbon Monoxide Sensing |
| title_full_unstemmed | Ultra-High Sensitivity Zinc Oxide Nanocombs for On-Chip Room Temperature Carbon Monoxide Sensing |
| title_short | Ultra-High Sensitivity Zinc Oxide Nanocombs for On-Chip Room Temperature Carbon Monoxide Sensing |
| title_sort | ultra high sensitivity zinc oxide nanocombs for on chip room temperature carbon monoxide sensing |
| topic | room temperature CO gas sensor CMOS compatible ultra-high sensitivity |
| url | http://www.mdpi.com/1424-8220/15/4/8919 |
| work_keys_str_mv | AT xiaofangpan ultrahighsensitivityzincoxidenanocombsforonchiproomtemperaturecarbonmonoxidesensing AT xiaojinzhao ultrahighsensitivityzincoxidenanocombsforonchiproomtemperaturecarbonmonoxidesensing |