Construction of micro-branched crosslink fluorinated polyimide with ultra-low dielectric permittivity and enhanced mechanical properties
There is a great demand for low dielectric materials as insulating interlayers in large-scale integrated circuit development. However, it is still a huge challenge to reduce the dielectric permittivity of polymers while maintaining excellent thermal stability and mechanical properties. In this work,...
Main Authors: | , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Budapest University of Technology
2022-02-01
|
Series: | eXPRESS Polymer Letters |
Subjects: | |
Online Access: | http://www.expresspolymlett.com/letolt.php?file=EPL-0011590&mi=cd |