Construction of micro-branched crosslink fluorinated polyimide with ultra-low dielectric permittivity and enhanced mechanical properties

There is a great demand for low dielectric materials as insulating interlayers in large-scale integrated circuit development. However, it is still a huge challenge to reduce the dielectric permittivity of polymers while maintaining excellent thermal stability and mechanical properties. In this work,...

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Bibliographic Details
Main Authors: Wanjing Zhao, Xianwu Cao, Jinshu Huang, Jiangwei Wen, Yun He, Junwei Zha, Robert Kwok Yiu Li, Wei Wu
Format: Article
Language:English
Published: Budapest University of Technology 2022-02-01
Series:eXPRESS Polymer Letters
Subjects:
Online Access:http://www.expresspolymlett.com/letolt.php?file=EPL-0011590&mi=cd