Generation of a Metal Ion Beam Using a Vacuum Magnetron Discharge
We have designed, fabricated and characterized an ion source based on a vacuum magnetron discharge. The magnetron discharge is initiated by a vacuum arc discharge, the plasma of which flows onto the magnetron sputtering target working surface. The vacuum arc material is usually the same as that of t...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-04-01
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| Series: | Plasma |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2571-6182/4/2/14 |