A high-accuracy working standard for absolute pressure from 5 kPa to 130 kPa
We describe a calibration device for absolute pressure ranging from 5 kPa to 130 kPa whose relative uncertainty contribution (k = 1), including stability, repeatability and linearity is better than 1 Pa. The device is composed of a capacitance diaphragm gauge (CDG) and a resonant silicon gauge (RSG)...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2017-01-01
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| Series: | International Journal of Metrology and Quality Engineering |
| Subjects: | |
| Online Access: | https://www.metrology-journal.org/articles/ijmqe/full_html/2017/01/ijmqe170033/ijmqe170033.html |