Integrated Optoelectronic Position Sensor for Scanning Micromirrors

Integrated Optoelectronic Position Sensor for Scanning Micromirrors

Scanning micromirrors have been used in a wide range of areas, but many of them do not have position sensing built in, which significantly limits their application space. This paper reports an integrated optoelectronic position sensor (iOE-PS) that can measure the linear displacement and tilting ang...

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Bibliographic Details
Main Authors: Xiang Cheng, Xinglin Sun, Yan Liu, Lijun Zhu, Xiaoyang Zhang, Liang Zhou, Huikai Xie
Format: Article
Language:English
Published: MDPI AG 2018-03-01
Series:Sensors
Subjects:
QPD
MOEMS
position sensor
optoelectronic position sensor
MEMS mirror
micromirror
Online Access:http://www.mdpi.com/1424-8220/18/4/982

Internet

http://www.mdpi.com/1424-8220/18/4/982

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