Elastic behavior of metal-assisted etched Si/SiGe superlattice nanowires containing dislocations
We systematically investigate structural parameters, such as shape, size, elastic strain, and relaxations, of metal-assisted etched vertically modulated Si/SiGe superlattice nanowires by using electron microscopy, synchrotron-based x-ray diffraction, and numerical linear elasticity theory. A vertica...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2022-04-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0084924 |