Principle of resonant micro-cantilever sensor and its research progress in biochemical detection
Resonant microcantilever is a mass-type sensor that transforms mass change into frequency-shift signals. Due to the advantages of high mass resolution, high sensitivity, low cost, easy integration and miniaturization, resonant microcantilevers have received extensive attention from researchers. In r...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
National Computer System Engineering Research Institute of China
2023-03-01
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| Series: | Dianzi Jishu Yingyong |
| Subjects: | |
| Online Access: | http://www.chinaaet.com/article/3000160061 |