On the reproducibility of electron-beam lithographic fabrication of photonic nanostructures
Abstract Photonic nanostructures such as gratings and ring resonators have become ubiquitous building blocks in Photonics. For example, they are used in filters, they resonantly enhance signals and act as grating couplers. Much research effort is invested in using such structures to create novel fun...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2024-04-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-024-58842-w |