The Effect of Defect Charge and Parasitic Surface Conductance on Aluminum Nitride RF Filter Circuit Loss

The Effect of Defect Charge and Parasitic Surface Conductance on Aluminum Nitride RF Filter Circuit Loss

When AlN thin films are deposited directly on the high-resistance silicon (HR-Si) substrate, a conductive layer will be formed on the HR-Si surface. This phenomenon is called the parasitic surface conduction (PSC) effect. The presence of the PSC effect will increase the power consumption of electron...

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Bibliographic Details
Main Authors: Tian Xu, Yali Zou, Xuan Huang, Junmin Wu, Shihao Wu, Yuhao Liu, Xuankai Xu, Fengyu Liu
Format: Article
Language:English
Published: MDPI AG 2023-02-01
Series:Micromachines
Subjects:
AlN
trap rich
polysilicon
CPW
RF loss
Online Access:https://www.mdpi.com/2072-666X/14/3/583

Internet

https://www.mdpi.com/2072-666X/14/3/583

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