A Flexible Vibration Probe Based on PZT Low-Frequency Drive Mode
Precision contact probes have a huge demand in industrial manufacturing due to their high accuracy. However, the passive measurement mode of the existing probe easily causes wear of the probe ball and loss of accuracy during continuous contact scanning. In this paper, a PZT(piezoelectric actuators)-...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2021-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9440939/ |