| Summary: | Precision contact probes have a huge demand in industrial manufacturing due to their high accuracy. However, the passive measurement mode of the existing probe easily causes wear of the probe ball and loss of accuracy during continuous contact scanning. In this paper, a PZT(piezoelectric actuators)-driven flexible probe is proposed with the dynamic time-domain function of the system response from low frequency to high drive frequency. The low-frequency measurement mode is established based on the linear response of the triangle wave. In order to avoid the trajectory nonlinearity of the stylus ball driven by PZT, the nonlinear mapping of the PZT hysteresis model is constructed by the BP neural network, and the linearly weighted particle swarm optimization (PSO) algorithm is used to realize the suppression of the response nonlinearity. Finally, the measurement experiment of the PZT-driven probe is conducted to reveal the measurement characteristics of low-frequency mode as well as measurement capability compared with commercial sensors.
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