The Heteroepitaxy of Thick <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> Film on Sapphire Substrate with a <i>β</i>-(Al<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub> Intermediate Buffer Layer
A high aluminum (Al) content <i>β</i>-(Al<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub> film was synthesized on c-plane sapphire substrate using the gallium (Ga) diffusion method. The obtained <i>β</i>-(Al<sub>x<...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-03-01
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| Series: | Materials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1996-1944/16/7/2775 |