Data-driven plasma modelling: surrogate collisional radiative models of fluorocarbon plasmas from deep generative autoencoders
We have developed a deep generative model that can produce accurate optical emission spectra and colour images of an ICP plasma using only the applied coil power, electrode power, pressure and gas flows as inputs—essentially an empirical surrogate collisional radiative model. An autoencoder was trai...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2023-01-01
|
| Series: | Machine Learning: Science and Technology |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2632-2153/aced7f |